Custom Capabilities

Using custom fabrication to meet your needs, we fulfill custom membrane silicon fabrication requests for a wide range of applications.

Popular Custom Solutions

We offer services ranging from genomic and photonic biosensors and microfluidic cell culture to protein and nanoparticle separations and high resolution, environmental electron, x-ray microscopy, and silicon membrane fabrication. Below are some of our most popular custom solutions including custom silicon membranes.

Silicon Wafer Specifications

100 and 150 mm diameter preferred
Range of thickness, orientation, resistivity, type, etc.
Alternative Materials: Possible

In-House Mask Design & Lithography
Specifications

Feature size resolution to 350 nanometers (line/space resolution)
Capabilities: Hard/Soft Contact & 5x reduction stepper technology
Layer-to-layer Alignment: 0.05 µm to 5 µm (Substrate dependent)
Front-to-back Alignment: <5 µm to 20 µm (Substrate dependent)

Silicon-Based Deposition

Amorphous Silicon: PVD deposited 5 to 50 nm thick
Single/Poly Crystalline Silicon: As thin as 25nm thick
Silicon Dioxide: Thermal, Sputter, or PECVD 10-4,000 nm thick
Silicon Nitride: Stoichiometric and Si-rich LPCVD 5-2,000 nm thick

Metal-Based Deposition

e-Beam and/or thermal evaporation of Al, Au, Ag, Cr, Ti, Ge, Ni, and more at ~3-200 nm thick
Lift-off Features: Down to 5 µm

Surface Functionalization

Wide range of monolayer-forming chemistries
Chemical Vapor Deposition or Anhydrous Solvent / Solution deposition processing

Device Packaging

Singulation by multiple methods – Customizable side profile
Pick-and-place packaging of dies into trays
Robotic assembly into devices
Laser marking of wafers and individual dies or devices

Laser Processing

Debris-free, non-contact die singulation
Ultra-Fast / Ultra-Short Pulsed laser marking, <12 micron spot size
Multiple laser processing / converting systems: CO2, MOPA, pulsed ns/ps/fs

Popular Membrane Materials

While we will custom-create any substrate for your needs, we most often find ourselves working with these popular custom silicon membrane fabrication materials.