Custom Capabilities
Using custom fabrication to meet your needs, we fulfill custom silicon membrane fabrication requests for a wide range of applications.
Custom Silicon Membrane Solutions
We offer services ranging from genomic and photonic biosensors and microfluidic cell culture to protein and nanoparticle separations and high resolution, environmental electron, x-ray microscopy, and silicon membrane fabrication. Below are some of our most popular custom solutions including custom silicon membranes.
Silicon Wafer Specifications
- 100 and 150 mm diameter preferred
- Range of thickness, orientation, resistivity, type, etc.
- Alternative Materials: Possible
In-House Mask Design & Lithography
Specifications
- Feature size resolution to 350 nanometers (line/space resolution)
- Capabilities: Hard/Soft Contact & 5x reduction stepper technology
- Layer-to-layer Alignment: 0.05 µm to 5 µm (Substrate dependent)
- Front-to-back Alignment: <5 µm to 20 µm (Substrate dependent)
Silicon-Based Deposition
- Amorphous Silicon: PVD deposited 5 to 50 nm thick
- Single/Poly Crystalline Silicon: As thin as 25nm thick
- Silicon Dioxide: Thermal, Sputter, or PECVD 10-4,000 nm thick
- Silicon Nitride: Stoichiometric and Si-rich LPCVD 5-2,000 nm thick
Metal-Based Deposition
- e-Beam and/or thermal evaporation of Al, Au, Ag, Cr, Ti, Ge, Ni, and more at ~3-200 nm thick
- Lift-off Features: Down to 5 µm
Surface Functionalization
- Wide range of monolayer-forming chemistries
- Chemical Vapor Deposition or Anhydrous Solvent / Solution deposition processing
Device Packaging
- Singulation by multiple methods – Customizable side profile
- Pick-and-place packaging of dies into trays
- Robotic assembly into devices
- Laser marking of wafers and individual dies or devices
Laser Processing
- Debris-free, non-contact die singulation
- Ultra-Fast / Ultra-Short Pulsed laser marking, <12 micron spot size
- Multiple laser processing / converting systems: CO2, MOPA, pulsed ns/ps/fs
Popular Membrane Materials
While we will custom-create any substrate for your needs, we most often find ourselves working with these popular custom silicon membrane fabrication materials.
Pure Silicon
- Amorphous, Single Crystal, or Nanocrystalline
- Sputter deposited 5 to 50 nm thick
- Nanocrystalline films are nanoporous with tunable pore sizes from 5 to 75 mm
Silicon Dioxide
- Amorphous silicon dioxide
- G-FLAT™ exclusive ultra-flat oxide
- Thermal, Sputter, or PECVD deposition
- Thicknesses from 20 to 4000 nm
Silicon Nitride
- Amorphous silicon nitride
- LPCVD Low stress – tunable
- Thicknesses from 5 to 2000 nm
- Ultra-flat suspended membranes
Send us a brief summary of your project’s requirements and we’ll get back to you with a custom evaluation.
Please note: This form is for custom product requests only. Please use the cart to generate a quote for standard inventory.
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